Advanced Technology Industry

• FPD clean ovens for LCD and OLED
• Sheet material ovens for high-performance films and
   secondary battery electrodes etc.
• Dryer for fuel cells and hydrogen tanks etc.

The FPD oven series is also capable of handling the IGZO and LTPS, which is drawing attention as the next generation display TFT. With our rich experience and know-how of the series, we satisfy customers' needs for various process configuration, such as in-line and stand-alone. For the equipment strongly reflecting customers' philosophy, such as the sheet material ovens for high-performance film and secondary battery electrode materials, and the dryers for fuel batteries and hydrogen tanks; we can meet customers' needs individually.