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Mass-Production Model / Experimental Horizontal Furnace Model 200 series

From small experiments and researches (R&D) to mass-production, the furnaces can be designed to meet users' needs.
The horizontal furnaces can be used for solar battery and photovoltaic power system (PV) production as well as silicon wafers.
Mass-Production Model / Experimental Horizontal Furnace Model 200 series

Feature

  • From experimental usage to mass production, various equipment configuration is available
  • Batch:25 to 150 wafers processing is available1
  • 1 to 4 stacks furnace configuration is implemented for taking advantage of limited square available
  • 2 to 8 inch and 300mm wafer size are available
  • LGO heater for Low and medium high temperature, HGC heater for high temperature are provided for excellent temperature performance
  • Proposing equipment configuration according to the customer’s needs based on usage, space, and budget
  • Simple and well equipped control system

The horizontal furnaces can be designed to meet users' requests ranging from the experiments and researches (R&D) of 3-, 4-, 6- and 8-inch wafers and 125 mm and 156 mm square cells to mass-production. As well as silicon wafers, the furnaces can be used for solar battery and photovoltaic power system (PV) production by phosphorus diffusion, boron diffusion, pyrogenic oxidation, wet oxidation, dry oxidation, annealing, etc. using POCl3, BBr3, etc.

Heater LGO heater, HGC heater
Flat zone length (mm) 250~800
Wafer size (mm) ~300
Temp. control 3 Zone
Transfer equipment Boat elevator, Boat loader, Cantilever loader, Soft loader
Applications Oxidation (Wet oxidation ,Dry oxidation), Diffusion (Pocl3 diffusion, BBr3 diffusion), Annealing
Associated item POCl3, BBr3
Manufactured article 3~8 inch silicon wafer
125 to 156 mm square wafer