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Horizontal Furnace for PV Production Model 206A

The horizontal furnace is suitable for solar battery and photovoltaic (PV) cell production. 100 – 156 square wafers can be mass-processed in a batch of 200 – 400 wafers each.
Horizontal Furnace for PV Production Model 206A

Feature

  • No.1 share in domestic market
  • Handles 100 to 200 mm square wafer
  • Batch: 200 to 400 wafers processing is available (depends on flat zone length and wafer pitch)
  • First heating up and cooling down, reduced power by KTS' exclusive LGO heater

The solar battery and photovoltaic (PV) cell manufacturing horizontal furnace processes 125 mm square and 156 mm square photovoltaic cells and 6- and 8-inch wafers. Optimal furnace for solar battery and photovoltaic (PV) cell production, this can perform phosphorus diffusion, boron diffusion, pyrogenic oxidation, wet oxidation, dry oxidation, annealing and other crystal system thermal processing using POCl3, BBr3 and other materials.

Outer dimension (mm) 850(W)×6700(L)×2500(H) (three-stage furnace)
Heater LGO heater
Flat zone length (mm) 1000
Temp. control 3~5 Zone
Transfer equipment Boat loader
Applications Oxidation (Wet oxidation ,Dry oxidation), Diffusion (Pocl3 diffusion, BBr3 diffusion), Annealing
Associated item POCl3, BBr3
Manufactured article 3~8 inch silicon wafer, 125 to 156 mm square wafer