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High-Temperature Clean Oven CLH Series

High-temperature baking in a clean environment enabled by the heat resistant high-performance filter and unique cooling unit.
A hot-air circulation system is used to highly accurately carry out wafer and glass substrate baking/aging, polyimide curing and annealing.
High-Temperature Clean Oven CLH Series

Maximum temperature
450°C/500°C
530°C
Save energy (compare to the conventional model)
55%OFF
(V series)

Feature

  • A heat resistant high-performance filter and our unique cooling unit are installed to enable high-temperature baking.
  • The chamber interior can keep class 100 cleanliness when the temperature is stable.
  • There are 2 hot-air blow types, front side blow horizontal circulation (type V) and side blow (type III). Both achieve high thermal efficiencies and good temperature uniformity.
  • This type of ovens is optimal for semiconductor wafer and glass substrate baking, aging and other heat treatments requiring high accuracies.
  • Inert gases can be introduced into the chambers to use the ovens as inert gas ovens.
Applications Baking and curing for semiconductor wafers and glass substrate
Options Oxygen concentration meter, signal tower, cold trap,
emergency stop, water leaking detector

2 types of hot-air blow are available, side blow type (type III) and front side blow type (type V). The clean ovens are equipped with heat resistant high-performance filters and our unique cooling units that enable high-temperature processing at up to 530°C (or up to 500°C with type V). Thanks to the good temperature uniformity achieved by the hot-air circulation system and class 100 air cleanliness (when the temperature is stable), the clean ovens are optimal for semiconductor wafer and glass substrate baking, aging and other purposes requiring high-temperature and high-accuracy processing. N2 gas can also be introduced into the chamber to use the oven at 20 ppm or lower residual O2 concentrations.

Inquiry about products
  • In addition to standard models, special specifications are available.
    If you are interested, access here.
High-temperature baking is enabled by a heat resistant high-performance filter and our unique cooling unit.
CLH series specifications
Cleanness CLASS 100 (ISO: CLASS 5)
(temperature stable time)
Oxygen concentration (Reference) Less than 20ppm
Control System Programmed controller
Shelf plate withstand
(Uniformly-distributed load)
15kg/shelf
Chamber pressure meter 0~2kPa
Filter pressure meter 0~1kPa
Thermocouple K
Exhaust port 1B · ball value
Safety feature Electric leak breaker,
heat protection, motor over-load protection,
control circuit breaker, cooling water flow meter
Standard accessory shelves (with shelf plates)
Type CLH-21CD(III) CLH-21CDH(III) CLH-21CD(V)
Method Convection (Side-flow) Convection rear to front
Max. operation Temperature(*1) 450°C 530°C 500°C
Normal operation Temperature(*1) RT+70~450°C RT+70~530°C RT+70~500°C
Temperature distribution (Reference)(*2) ±5°C(at 450°C) ±8°C(at 530°C) ±5°C(at 500°C)
Heat up time (Reference)(*1) Within 80 minutes (RT+70~450°C) Within 90 minutes (RT+70~530°C) Within 80 minutes (RT+70~500°C)
Cool down time (Reference) Within 90 minutes (450~100°C) Within 100 minutes (530~100°C) Within 90 minutes (500~100°C)
Filter Heat-resistant HEPA filter
Oxygen concentration (Reference) Within 45 minutes (N2·250L/min introduce)
Heater power 33.6kW(at 200V) 21kW(at 200V)
Temperature recorder 1 pen temperature recorder (control point · Thermocouple K)
Outer dimension (mm) 1285(W)×2020(H)×1605(D) 1180(W)×2110(H)×1670(D)
Inside dimension (mm) 670(W)×700(H)×500(D) 700(W)×700(H)×500(D)
(*3)
Equipment weight approx. 1050kg approx. 1100kg
Breaker capacity AC 200V 150A
3ø 50/60Hz
AC 200V 75A
3ø 50/60Hz
Type CLH-35CD(III) CLH-35CDH(III)
Method Convection (Side-flow)
Max. operation Temperature(*1) 450°C 530°C
Normal operation Temperature(*1) RT+70~450°C RT+70~530°C
Temperature distribution (Reference)(*2) ±5°C(at 450°C) ±8°C(at 530°C)
Heat up time (Reference)(*1) Within 70 minutes (RT+70~450°C) Within 120 minutes (RT+70~530°C)
Cool down time (Reference) Within 100 minutes (450~100°C) Within 120 minutes (530~100°C)
Filter Heat-resistant HEPA filter
Oxygen concentration (Reference) Within 50 minutes (N2·250L/min introduce)
Heater power 48.3kW(at 200V)
Temperature recorder 1 pen temperature recorder (control point · Thermocouple K)
Outer dimension (mm) 1285(W)×2080(H)×1775(D)
Inside dimension (mm) 670(W)×790(H)×670(D)
Equipment weight approx. 1250kg
Breaker capacity AC 200V 175A
3ø 50/60Hz
(*1) Heat-up available temperature is figures at control point in a heating chamber.
(*2) Valid dimension is two-thirds inside dimension.
(*3) Inside width is 700 mm, opening width is 630 mm.
Specifications
  • For product improvement the specifications, exterior appearance and other conditions may be modified without notice.
Inquiry about products
  • In addition to standard models, special specifications are available.
    If you are interested, access here.