Products

Clean Oven CLO Series

Class 100 air cleanliness is achieved by higher airtightness enabled by entirely sealing the inner chamber. Heat treatments in a N2 atmosphere are also available.
The hot-air circulation system improves curing and annealing yields.
Clean Oven CLO Series

Maximum temperature
200°C/
350°C(H type)

Feature

  • The high airtightness secured by sealing the entire inner chamber surface keeps good cleanliness and atmosphere.
  • Heat resistant HEPA filters are used and the chamber interior can keep class 100 cleanliness while the temperature is stable.
  • The optional N2 introduction system achieves 100 ppm or lower residual O2 concentrations (referential value) within the chamber.
  • Optimal for semiconductor wafer, glass substrate baking, aging and other purposes requiring highly accurate processing.
Applications Baking and curing for semiconductor wafers and glass substrate
Options Oxygen concentration meter, signal tower,
Programmed controller, Temperature recorder

Thanks to the high airtightness created by sealing the entire surface of the inner chamber and heat resistant HEPA filters, class 100 air cleanliness is achieved (while the temperature is stable). The ovens are suitable for semiconductor wafer, glass substrate baking, aging and other precision part processing requiring higher reliability and yield. The optional N2 introduction system can be installed to perform processing at 100 ppm or lower residual O2 concentrations.

Inquiry about products
  • In addition to standard models, special specifications are available.
    If you are interested, access here.
Good cleanliness is kept by high airtightness.
CLO series specifications
Method Convection (Side-flow)
Max. operation Temperature(*1) 200°C/350°C(H type)
Normal operation Temperature(*1) RT+60~200°C/RT+60~350°C(H type)
Temperature distribution (Reference)(*2) ±4°C(at 200°C)/±8°C(at 350°C)(H type)
Heat up time (Reference)(*1) Within 60 minutes (RT+60~200°C)/Within 120 minutes (RT+60~350°C)(H type)
Cleanness CLASS 100 (ISO: CLASS 5)
(temperature stable time)
Filter Heat-resistant HEPA filter(H type)
Oxygen concentration (Reference) Less than 100ppm (N2 introduce)
Control System Temperature Controller
Thermocouple K
Safety feature Over-heat Protection,
cooling water flow meter (H type),
heat protection, motor over-load protection,
Circuit Breaker
Standard accessory 2 shelves (with shelf plates)
(*1) Temperature at the control point within the heating chamber.
(*2) Valid dimension is two-thirds inside dimension.
☆ Cooling water is necessary to protect seal packing for H-type.
☆ Thermocouples are consumable items.
Type CLO-2A(H) CLO-9C(H) CLO-21C(H)
Heater power (Reference) 1.2kW(at 100V) 3.0kW(at 200V) 4.8kW(at 200V)
Shelf plate withstand
(Uniformly-distributed load)
5kg/shelf 15kg/shelf
Filter pressure meter 0~1kPa(options) 0~1kPa
Outer dimension (mm) 590(W)
×
460(H)
×
600(D)
1040(W)
×
690(H)
×
900(D)
860(W)
×
1470(H)
×
1010(D)
Inside dimension (mm) 250(W)
×
250(H)
×
250(D)
450(W)
×
450(H)
×
450(D)
660(W)
×
660(H)
×
500(D)
Equipment weight approx. 45kg approx. 180kg approx. 250kg
Exhaust port 1/4B · ball value 3/8B · ball value 1/2B · ball value
Breaker capacity AC 100V 20A
1ø 50/60Hz
AC 200V 20A
3ø 50/60Hz
Safety feature Breaker Earth Leakage Breaker
Specifications
  • For product improvement the specifications, exterior appearance and other conditions may be modified without notice.
Inquiry about products
  • In addition to standard models, special specifications are available.
    If you are interested, access here.