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Heat Treatment Industrial Equipment

Vacuum Furnace Vacuum Furnace Hardening, brazing and annealing are available in a vacuum environment. Our furnace lineup includes 2-chamber and 3-chamber furnaces equipped with separate quenching oil tank or gas cooling chamber.
Vacuum Purge Furnace Vacuum Purge Furnace The external heating type vacuum purge furnace with a Moldatherm heater and a metallic muffle.

Semiconductor

Low-Cost Mini Batch Vertical Furnace VF-3000 Low-Cost Mini Batch Vertical Furnace VF-3000 The low-price vertical furnace equipped with an auto conveyor can be used for the range from R&D to mass-production of 4- to 8-inch wafers. We have achieved such a low price that after-process users can introduce the furnace. Ultra high-temperature treatment is available and best suited for power device manufacture.
Vertical Furnace for a small of production and R&D VF-1000 Vertical Furnace for a small of production and R&D VF-1000 The small production type vertical furnace for experiments and researches (R&D) achieves high-quality processing. The furnace is compact and requires only a small installation area but usable for a wide range of wafer diameter and exhibits the same temperature characteristics as those of mass-production furnaces.
Mass-Production Model / Experimental Horizontal Furnace Model 200 series Mass-Production Model / Experimental Horizontal Furnace Model 200 series From small experiments and researches (R&D) to mass-production, the furnaces can be designed to meet users' needs. The horizontal furnaces can be used for solar battery and photovoltaic power system (PV) production as well as silicon wafers.
Lamp Annealing System for Speedy Thermal Processing RLA-1200 Lamp Annealing System for Speedy Thermal Processing RLA-1200 The lamp annealing system for 4-inch to 8-inch wafers achieves high-quality processing even for use in R&D. Activation and oxidation are available in a vacuum (LP) environment and N2 load-lock atmosphere.

Advanced Technology Industry

Clean Oven, Single Substrate Transfer Type CCBS series Clean Oven, Single Substrate Transfer Type CCBS series Our best-selling clean ovens for LCDs and OLEDs! Zero-damage to substrates, Treatment of sublimates during color filter resist post baking.
IR Furnace, Single Substrate Transfer Type CCBS-IR series IR Furnace, Single Substrate Transfer Type CCBS-IR series IR-heating type, single substrate transfer clean ovens, CCBS-IR series. For various baking treatment of IGZO, the next generation display TFT, and other LCDs and OLEDs.
Vacuum Dryer CCBS-V spec Vacuum Dryer CCBS-V spec Capable of vacuum dehydration baking and annealing of the LCD and OLED substrates of up to 10th generation. Supports various configurations, such as in-line with a preceding and succeeding process and using robots.
Clean Batch System CBS series Clean Batch System CBS series Batch clean ovens suitable for the LTPS treatment. Standard model satisfying both specification and cost. Also capable of atmosphere treatment.

Conveyor Furnace for Electronics Industry

Compact Conveyor Furnace 810A Compact Conveyor Furnace 810A Small size with a reduced installation area, and capable of heat treatment in various atmospheres. Small conveyor furnace suitable for thick film baking, electrode drying, and ceramic substrate manufacturing experimentation.

Laboratory Electric Furnace & Oven

Box Furnace KBF 1150 deg C Series Box Furnace KBF 1150 deg C Series Desktop electrical furnaces (box furnaces) for experiments and laboratory researches. Standard type for 1150 deg C heat treatments using Moldatherm LGO heaters for high-speed temperature rising and falling and energy saving.
Box Furnace KBF 1250 deg C Series Box Furnace KBF 1250 deg C Series High-speed temperature raising and falling and energy saving by Moldatherm LGO heaters The best processing using muffles is available.
Box Furnace KBF 1500 deg C Series Box Furnace KBF 1500 deg C Series These electrical furnaces (box furnaces) are desktop types but can perform heat treatments at 1500 deg C by using SiC heaters. The use of SiC heaters achieves high-speed temperature increase and energy saving. Auto mode experiments are available using programmers.
Box Furnace KBF 1700 deg C Series Box Furnace KBF 1700 deg C Series The high-temperature electrical furnaces (box furnaces) that are desktop type but can be used for as high as 1700 deg C heat treatments. Long-life molybdenum disilicide heaters are used, for easy replacement. The programmer is a 19-pattern, high-performance type.
Box Furnace KBF 1800 deg C Series Box Furnace KBF 1800 deg C Series The high-temperature electrical furnaces (box furnaces) that are desktop type but can be used for as high as 1800 deg C heat treatments. Long-life molybdenum disilicide heaters are used, for easy replacement. The programmer is a 19-pattern, high-performance type.
Muffle Equipped Box Furnace KBF 1250 deg C-S Muffle Equipped Box Furnace KBF 1250 deg C-S Experiment and laboratory research use desktop electrical furnaces (box furnaces) developed by installing metallic muffles in the KBF 1250 deg C series furnaces so that heat treatments at 1000 deg C can be carried out within airtight vessels.
Tube Furnace KTF 1100 deg C Series (1 Zone Control) Tube Furnace KTF 1100 deg C Series (1 Zone Control) Electrical furnaces (tube furnaces) for experiments and laboratory researches Horizontal, desktop, energy-saving furnaces can perform heat treatments in atmospheres using furnace tubes.
Tube Furnace KTF 1100 deg C Series (3 Zone Control) Tube Furnace KTF 1100 deg C Series (3 Zone Control) 3-zone controlling high-accuracy electrical furnaces for experiments and laboratory researches
Tube Furnace KTF 1200 deg C Series (3 Zone Control) Tube Furnace KTF 1200 deg C Series (3 Zone Control) 3-zone controlling, high-accuracy type electrical furnaces (tube furnaces) for experiments and laboratory researches Higher-grade type equipped with overheating preventing meters in all zones and half-divided type Moldatherm heaters.
Tube Furnace KTF 1500 deg C Series (1 Zone Control) Tube Furnace KTF 1500 deg C Series (1 Zone Control) Electrical furnaces (tube furnaces) using SiC heaters for experiments and laboratory researches Horizontal, desktop, energy-saving type Furnace tubes can be additionally installed for heat treatments in atmospheres.
Tube Furnace KTF 1700 deg C Series (1 Zone Control) Tube Furnace KTF 1700 deg C Series (1 Zone Control) Electrical furnaces using MoSiO2 heaters for experiments and laboratory researches
Vacuum Purge Type Small Box Furnace uBF Vacuum Purge Type Small Box Furnace uBF Based on the KBC series which has a good delivery record, the vacuum purge structure reduces the purging time. The multi-purpose electrical box furnaces perform heat treatments in a N2 atmosphere or H2 (reducing) atmosphere.
Compact Continuous Furnace 810A Compact Continuous Furnace 810A The compact furnaces require only small installation areas and perform heat treatments in a H2 (reducing) atmosphere. The compact conveyor furnaces are optimal for thick film firing, electrode drying and ceramic board manufacture experiments.
Vacuum Bake Furnace Vacuum Bake Furnace The electrical box furnace developed for heat treatments in a vacuum environment. The furnace performs baking, drying, degreasing, hardening, annealing and various other treatments in short cycle time.
High-Tempe Atmosphere Box Furnace High-Tempe Atmosphere Box Furnace Introduction of high-temperature atmosphere box furnaces that can perform high-temperature processing (firing, sintering and annealing) in N2, H2, vacuum and various other atmospheres.
Vacuum Purge Type Small Box Furnace KBF848N-V Vacuum Purge Type Small Box Furnace KBF848N-V The compact, desktop, electrical box furnace for experiments. High-temperature heat treatment in a vacuum or N2 atmosphere is possible.
Vacuum Purge Typel Box Furnace MB series Vacuum Purge Typel Box Furnace MB series The KBF1150 deg C type compact electrical furnace was refined and remodeled to this floor type box furnaces. N2 atmosphere replacing time is reduced by vacuum purge. The heat treatment furnaces are suitable for LTCC and MLCC manufacture.
Atomosphere Oven KLO Series Atomosphere Oven KLO Series Compact, desktop and simple but easy-to-use hot air circulation type ovens for experiments and laboratory researches usable for drying, curing, annealing and tempering.
High-Temperature Oven HTO Series High-Temperature Oven HTO Series Side-flow hot-air circulation type ovens for high-temperature heat treatments at up to 500 deg C A program control function is built in, and the ovens can be used for drying, curing, annealing, tempering and other small production also.
Ultra High-Temperature Oven UTO Series Ultra High-Temperature Oven UTO Series Hot-air circulation type ultra high-temperature ovens for heat treatments at up to as high as 700 deg C Usable for a wide range of thermal processing from firing, incineration and other high-temperature heat treatments to drying and other low-temperature heat treatments.
Inert Gas Oven INL Series Inert Gas Oven INL Series Hot-air circulation type ovens performing heat treatments in the environments using N2 atmospheres at 20 ppm or lower O2 concentrations. They achieve ceramic part debinding (defatting), annealing and other effective heat treatments.
Inert Gas Oven INH Series Inert Gas Oven INH Series The ovens perform heat treatments at up to as high as 600 des C in a N2 atmosphere, achieving 20 ppm of low O2 concentration. The ovens are the type for production and have been used for abundant ceramic part defatting and various other non-oxidation heat treatments.
Compact-type Inert Gas Oven KLO-30NH Compact-type Inert Gas Oven KLO-30NH Compact N2 atmosphere oven optimal for researches and development Debinding, defatting, annealing and other heat treatments at lower than 300 ppm of O2 concentrations
Clean Oven CLO Series Clean Oven CLO Series Class 100 air cleanliness is achieved by higher airtightness enabled by entirely sealing the inner chamber. Heat treatments in a N2 atmosphere are also available. The hot-air circulation system improves curing and annealing yields.
High-Temperature Clean Oven CLH Series High-Temperature Clean Oven CLH Series High-temperature baking in a clean environment enabled by the heat resistant high-performance filter and unique cooling unit. A hot-air circulation system is used to highly accurately carry out wafer and glass substrate baking/aging, polyimide curing and annealing.
Exhaust Gas Burn-out System GM Series Exhaust Gas Burn-out System GM Series Organic matters in the exhaust gas from ceramics temporary sintering and electronic part defatting are completely burnt. Exhaust gas thermal cracking is available at a maximum of 850 deg C.