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Clean Batch System CBS series

Batch clean ovens suitable for the LTPS treatment.
Standard model satisfying both specification and cost.
Also capable of atmosphere treatment.
Clean Batch System CBS series

Feature

  • The atmospheric process is available
    The original sealed structure has enabled the process with no oxidization by charging inert gas.
  • Maximum available temperature 500°C
    With the ultra high HEPA filter adopted, the maximum available temperature at 500°C has been achieved.
  • High throughput
    Cycle time reduction is possible by oven rapid cooling system and/or speedy substrate-transfer.

This batch clean oven series is suitable for LTPS treatment at operating temperature up to 500°C. The reason for the long-selling model for more than 20 years is the satisfying specification and cost which secure the treatment process. Despite of being a batch type, it achieves high throughput with the forced cooling mechanism.

Available glass size (mm) 300(W)×400(L)~730(W)×920(L)
Temperature range 80~500°C
Temperature uniformity ±5°C
Cleanliness Class 10 (0.3µm)
Applications A wide variety of Annealing of LTPS & TFT