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This is the best selling model of the clean oven for the FPD heating process.
High productivity, high clean and energy saving
We offer high-level cleanliness and high heating efficiency.
Heating process in vacuum is available
It is available for the 10th generation
Standard model adopted for LTPS to satisfy both specifications and the cost performance.
Flagship model that has achieved semiconductor specification.
Various kinds of process are available such various kinds of gas atmosphere.
A bulk transfer of the glass substrate loaded in a heat-resistant cassette has realized high production efficiency.
The reliable conveyance of large sized glass substrate of through the furnace, saving energy, and keeping clean condition.
